CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Features
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Suitable for sputtering process.
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The displacement of argon is about 2.5 times that of the conventional model (U8H).
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The hydrogen exhaust rate has improved to about 1.2 times that of the conventional model (U8H).
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The interval to playback becomes longer, contributing to the improvement of equipment availability.
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Multiple operation (up to 3 units)
Inquiry - CRYO-U 8HSP
