This A10S is a Multi Stage Dry Pump part of the second generation of dry pumping solutions introduced by Ebara. It has a compact design and includes various sensors and controls reporting to the handheld LCD display or to a parent vacuum chamber to enhance the operation. It utilizes a water cooled canned motor driving multi stage tri-lobe roots pumping technology. The A10S is an excellent choice for load lock, transfer chambers and other relatively benign applications that can benefit from a dry pump.
| Pumping Speed | Ultimate Pressure | Motor Power | Inlet | Exhaust |
|---|---|---|---|---|
| 42 CFM | 30 mTorr | 2.2 kW | NW40 | NW40 |
Inquiry - A10S
