-
FOUP/Open cassette available
-
Stable peeling performance by Peeling Trigger
-
Low stress peeling by accurate control of Peeling bar
-
Easy operation by Touch panel & Recipe function
-
Log file function standard equipment
-
Follow to CE mark / SEMI S2/S8
-
Adding Wafer mapping scanner available
-
Adding SECS/GEM available
Inquiry - HSA840
